Vacuum Components R&D Case
Vacuum Components
Product | Type | Benefit |
---|---|---|
Slit Valve | Monovat | Long life cycle, Particle reduction |
Dual Blade | Reduce shut down time, Efficient chamber maintenance available | |
L-Motion | Mechanical lock / Pneumatically lock against differential pressure reinforcement | |
RPS isolation Valve | Angle | Long life cycle, Particle reduction, Patented gas flow guidance structure |
Gate | Long life cycle, Particle reduction, Extremely high temperature application, Protection ring mechanism, The optional cooling system | |
Gate Valve | Manual | Long life cycle, Cost Saving |
Pneumatic | Long life cycle, Cost Saving, Lightweight, The optional heating module | |
Protection | Long life cycle, Superior performance at harsh processes, The optional direct heating module against powder deposition | |
Heating | Particle reduction | |
Angle Valve | Manual | Long life cycle, Cost Saving |
Pneumatic | Long life cycle, Cost Saving, The optional heating module | |
Heating | Particle reduction | |
in-line | Long life cycle, High conductance | |
2 stage | Long life cycle, Soft pumping module, Longer life cycle with The optional heating module | |
Butterfly Valve | Manual | Long life cycle, Cost Saving, Easy to maintenance and operation, The optional heating module |
Pneumatic | Long life cycle, Cost Saving, Compact structure, The optional heating module | |
APC Valve - Parts | Throttle | Long life cycle |
Pendulum | Long life cycle |
Product | Performed Project |
---|---|
Slit Valve | AMAT - Slit Valve Modification for CVD |
RPS isolation Valve | AMAT- RPS Valve for TEOS Process |
Slit Valve | LAM - Dual Blade Slit Valve for Etch Process |
RPS isolation Valve | LAM - RPS Valve for PEOX Process |
RPS isolation Valve | ASM - RPS Valve for ALD Process |
RPS isolation Valve | WONIK IPS - Particle Free RPS Valve for ALD/TEOS Process |
RPS isolation Valve | WONIK IPS - RPS Gate Valve for Mold Process |
Angle Valve | PSK - Advanced 2 Stage Valve for PSK Asher |
RPS isolation Valve | New Power Plasma - High Temperature RPS Valve |
Gate Valve | Pfeiffer Vacuum - Vacuum Pump Protection Gate Valve |
Gate Valve | Pfeiffer Vacuum - Vacuum Pump Gate Valve with Bonded Seal Gate |
Gate Valve | LAM -Protection Gate Valve for PE-CVD Process |
Gate Valve | KKT - Vacuum Pump Protection Gate Valve |
Gate Valve | Edwards - Vacuum Pump Auto Gate Valve |
Gate Valve | Ebara - Vacuum Pump Protection Gate Valve with Slow Pumping |
Butterfly Valve | R&D - Butterfly Valve For R&D facility |
Gate Valve | TEL - DN 50 Protection Valve |
Angle Valve | TEL - VEP1, VEP2 Angle Valve for Ti/TiN Process |
Angle Valve | SK hynix - Heated Angle Valve DN40 |
APC Valve | AMAT - Throttle Valve ( Flapper ) For ACL Process |
APC Valve | Aixtron - Throttle Valve ( Flapper ) For MOCVD Process |
APC Valve | AMAT - Pendulum Valve ( Gate ) For Oxide Etch Process |