SMART FMS(Facility Management System) :
multi-infrastructure integrated-management system
SMART FMS collects and analyzes data of various facilities in the process in real time to detect errors and
provides various charts on data to support all the technical functions and specific application functions necessary for smooth and stable operation of facilities.
Features
Real Time Monitoring
Real-time monitoring of comprehensive status of facilities
Evaluation of the status, performance, faults and alarms of facilities
Customized monitoring screen
User Customized Aalarm
Setting Admin, set user's alarm
Setting alarm for each user
Trace / Summary Data View
Analysis of specific parameter trends and comparison of parameters between equipment
Trend analysis by analyzing long-term trace data
Customized Report
Mailing
Establishment of criteria and abnormality level for the case of serious abnormality
Notification per e-mail according to the above grade
Messenger
Messenger and MMS are sent to administrator when alarming
SMART CMS(Central Monitoring System) :
Real-time central monitoring system
SMART CMS helps to protect customers' assets, minimize risk of service disruption, and
improve productivity by maintaining optimal status and predictive maintenance through real-time monitoring of various equipment status and
surrounding environment in semiconductor process.
Features
Real Time Monitoring
Real-time monitoring of comprehensive status of facilities
Providing storage image for status, performance, abnormality, and alarm of equipment through interworking with SMART FMS